AZ Photoresists
Micro Materials offers a wide range of photolithography chemicals. These can be supplied in small bottle sizes, such as 250ml, 500ml, 1 litre, 2.5 litres and 5 litres, to suit the R&D community.
Hence, minimising any excessive wastage associated with unused resists purchased in larger bottle sizes.
THIN POSITIVE PHOTORESISTS
AZ® 1500, MIR & ECI Series Photoresists
The AZ® 1500 photoresist series yields an improved adhesion for all common wet etching processes. The lateral resolution depends on the resist film thickness and reaches down to sub-μm.
The members of the AZ® 1500 differ in the solvent concentration, the photo active compound content, and special reins for different applications in the field of wet etching:
- AZ 1505
- AZ 1512 HS
- AZ 1514 H
- AZ 1518
- AZ 1518 HS
- AZ MIR 701
- AZ ECI 3007
- AZ ECI 3012
- AZ ECI 3027
THICK POSITIVE PHOTORESISTS
AZ® XT, 4500 & P4000 Series Photoresists
The following are members of the thick positive photoresists available:
- AZ 10XT
- AZ 12XT
- AZ 40XT
- AZ 4533
- AZ 4562
- AZ P4110
- AZ P4620
- AZ P4903
NEGATIVE & LIFT-OFF PHOTORESISTS
AZ® nXT & nLof Series Photoresists
The following are members of the negative and Lift-off photoresists:
- AZ 125nXT
- AZ 15nXT (115CPS)
- AZ 15nXT (450CPS)
- AZ 5214 E
- AZ nLof 2020
- AZ nLof 2035
- AZ nLof 2070
- AZ nLof 5510